High Resolution Differential Capacitance Detection Scheme for Micro Levitated Rotor Gyroscope

A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity simulation are conducted. In the capacitance interface, an integral charge amplifier is adopted as a front end amplifier to reduce the parasitic capacitance caused by connecting wire. For the novel differential capacitance bridge with a coupling capacitor, the noise floor and non-linearity of the detection circuit are analyzed, and the results show that the detecting circuit is capable of realizing angle detection with high angular resolution and relative low non-linearity.With a specially designed printed circuit board, the circuit is simulated by PSpice. The practical experiment shows that the detection board can achieve angular resolution as high as 0.04° with a non-linearity error 2.3%.

作 者： Huang Xiaogang Chen Wenyuan Liu Wu Zhang Weiping Wu Xiaosheng   作者單位： Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China  刊 名： 中國(guó)航空學(xué)報(bào)(英文版)  ISTIC 英文刊名： CHINESE JOURNAL OF AERONAUTICS  年，卷(期)： 2007 20(6)  分類號(hào)： V2  關(guān)鍵詞： MEMS   micro gyroscope   capacitance sensing   inertial sensor   angle detection  

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