PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evaporation parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10-4 pa, respectively.

作 者： X.W.Shi Z.Y.Liu D.C.Zeng C.M.Li   作者單位： Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China  刊 名： 金屬學報(英文版)  ISTIC EI 英文刊名： ACTA METALLURGICA SINICA  年，卷(期)： 2003 16(4)  分類號：   關鍵詞： vacuum evaporation   resistance of film   vacuity  

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